Series: MEMS Reference Shelf

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cover image of MEMS Materials and Processes Handbook

MEMS Materials and Processes...

MEMS Reference Shelf (Series)

Reza Ghodssi Editor
Pinyen Lin Editor
(2011)

cover image of Multi-Wafer Rotating MEMS Machines

Multi-Wafer Rotating MEMS...

MEMS Reference Shelf (Series)

Jeffrey Lang Editor
(2009)

cover image of RF MEMS Switches and Integrated Switching Circuits

RF MEMS Switches and...

MEMS Reference Shelf (Series)

Ai-Qun Liu Author
(2010)

cover image of MEMS Reliability

MEMS Reliability

MEMS Reference Shelf (Series)

Allyson L. Hartzell Author
Mark G. da Silva Author
(2010)

cover image of BioNanoFluidic MEMS

BioNanoFluidic MEMS

MEMS Reference Shelf (Series)

Peter J. Hesketh Editor
(2007)

cover image of Radioisotope Thin-Film Powered Microsystems

Radioisotope Thin-Film...

MEMS Reference Shelf (Series)

Rajesh Duggirala Author
Amit Lal Author
(2010)

cover image of Photonic Microsystems

Photonic Microsystems

MEMS Reference Shelf (Series)

Olav Solgaard Author
(2009)

cover image of MEMS Vibratory Gyroscopes

MEMS Vibratory Gyroscopes

MEMS Reference Shelf (Series)

Cenk Acar Author
Andrei Shkel Author
(2008)

cover image of Microfluidic Technologies for Miniaturized Analysis Systems

Microfluidic Technologies for...

MEMS Reference Shelf (Series)

Steffen Hardt Editor
Friedhelm Schönfeld Editor
(2007)